검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Printability of nonsmoothed buried defects in extreme ultraviolet lithography mask blanks Farys V, Charpin-Nicolle C, Richard M, Robic JY, Muffato V, Quesnel E, Postnikov S, Schiavone P, Besacier M, Smaali R, Naulleau P Journal of Vacuum Science & Technology B, 23(6), 2860, 2005 |
| 2 |
Measurement of residual thickness using scatterometry Fuard D, Perret C, Farys V, Gourgon C, Schiavone P Journal of Vacuum Science & Technology B, 23(6), 3069, 2005 |