검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Physical and Electrical Characteristics of Thin Silicon-Nitride Dielectric Films Deposited on Smooth and Rugged Polycrystalline Silicon After Rapid Thermal Nitridation Mathews VK, Ditali A, Fazan PC Journal of the Electrochemical Society, 141(4), 1066, 1994 |
| 2 |
Thermal-Stability of Thin Poly-Si/Ta2O5/Tin Capacitors for Dynamic Random-Access Memory Applications Ishibashi K, Patnaik BK, Parikh NR, Sandhu GS, Fazan PC Journal of Vacuum Science & Technology B, 12(4), 2822, 1994 |