검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Inductively coupled plasma etching of GaAs in Cl-2/Ar, Cl-2/Ar/O-2 chemistries with photoresist mask Liu K, Ren XM, Huang YQ, Cai SW, Duan XF, Wang Q, Kang C, Li JS, Chen QT, Fei JR Applied Surface Science, 356, 776, 2015 |
| No. | Article |
|---|---|
| 1 |
Inductively coupled plasma etching of GaAs in Cl-2/Ar, Cl-2/Ar/O-2 chemistries with photoresist mask Liu K, Ren XM, Huang YQ, Cai SW, Duan XF, Wang Q, Kang C, Li JS, Chen QT, Fei JR Applied Surface Science, 356, 776, 2015 |