검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Development of 157 nm positive resists Ito H, Wallraff GM, Fender N, Brock PJ, Hinsberg WD, Mahorowala A, Larson CE, Truong HD, Breyta G, Allen RD Journal of Vacuum Science & Technology B, 19(6), 2678, 2001 |
| No. | Article |
|---|---|
| 1 |
Development of 157 nm positive resists Ito H, Wallraff GM, Fender N, Brock PJ, Hinsberg WD, Mahorowala A, Larson CE, Truong HD, Breyta G, Allen RD Journal of Vacuum Science & Technology B, 19(6), 2678, 2001 |