화학공학소재연구정보센터
검색결과 : 3건
No. Article
1 Stress relaxation and phase stability of cubic boron nitride films during ion post implantation and annealing
Fitz C, Fukarek W, Moller W
Thin Solid Films, 408(1-2), 155, 2002
2 Stress relaxation during annealing of boron nitride films
Fitz C, Kolitsch A, Fukarek W
Thin Solid Films, 389(1-2), 173, 2001
3 In situ measurement of stress during deposition of boron nitride films
Fukarek W, Fitz C, Kolitsch A, Moller W
Materials Science Forum, 347-3, 156, 2000