검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
Effects of annealing on X-ray-amorphous CVD W-Si-N barrier layer materials Gokce OH, Amin S, Ravindra NM, Szostak DJ, Paff RJ, Fleming JG, Galewski CJ, Shallenberger J, Eby R Thin Solid Films, 353(1-2), 149, 1999 |
| 2 |
Growth and properties of W-Si-N diffusion barriers deposited by chemical vapor deposition Fleming JG, Roherty-Osmun E, Smith PM, Custer JS, Kim YD, Kacsich T, Nicolet MA, Galewski CJ Thin Solid Films, 320(1), 10, 1998 |
| 3 |
Fabrication and Testing of Vertical Metal Edge Emitters with Well-Defined Gate to Emitter Separation Fleming JG, Ohlberg DA, Felter T, Malinowski M Journal of Vacuum Science & Technology B, 14(3), 1958, 1996 |
| 4 |
In-Situ Monitoring of the Products from the Sih4+wf6 Tungsten Chemical-Vapor-Deposition Process by Microvolume Moss Spectrometry Cheek RW, Kelber JA, Fleming JG, Blewer RS, Lujan RD Journal of the Electrochemical Society, 140(12), 3588, 1993 |