검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Fabrication of sawtooth diffraction gratings using nanoimprint lithography Chang CH, Heilmann RK, Fleming RC, Carter J, Murphy E, Bailey TC, Ekerdt JG, Frankel RD, Voisin R Journal of Vacuum Science & Technology B, 21(6), 2755, 2003 |
| 2 |
Nanoscale freestanding gratings for ultraviolet blocking filters van Beek JTM, Fleming RC, Hindle PS, Prentiss JD, Schattenburg ML, Ritzau S Journal of Vacuum Science & Technology B, 16(6), 3911, 1998 |
| 3 |
Optically Matched Trilevel Resist Process for Nanostructure Fabrication Schattenburg ML, Aucoin RJ, Fleming RC Journal of Vacuum Science & Technology B, 13(6), 3007, 1995 |