검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Properties of fluorinated silica glass deposited at low temperature by atmospheric plasma-enhanced chemical vapor deposition Barankin MD, Williams TS, Gonzalez E, Hicks RF Thin Solid Films, 519(4), 1307, 2010 |
| 2 |
On the contributions of the electronic polarizability and porosity to the reduction of the refractive index of SiOF films deposited by remote plasma-enhanced chemical vapor deposition Alonso JC, Diaz-Bucio XM, Pichardo E, Rodriguez-Fernandez L, Ortiz A Thin Solid Films, 474(1-2), 294, 2005 |
| 3 |
Surface modification of spin-on-glass film by liquid-phase deposition of fluorinated silicon oxide Homma T, Kondo H, Inohara K, Nomoto M, Sakamoto M, Ariyama Y, Takahashi H Thin Solid Films, 392(1), 107, 2001 |