검색결과 : 2건
No. | Article |
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1 |
High-power collimated laser-plasma source for proximity x-ray nanolithography Gaeta CJ, Rieger H, Turcu ICE, Forber RA, Campeau SM, Cassidy KL, Powers MF, Stone A, Maldonado JR, Mrowka S, French G, Naungayan J, Kelsy C, Hark P, Morris JH, Foster RM, Carosella JC, Fleming D, Selzer F, Siegert H, Smith HI, Lim MH, Cheng Z, Burdett J, Gibson D, Whitlock RR, Dozier CM, Newman DA Journal of Vacuum Science & Technology B, 21(1), 280, 2003 |
2 |
Collimated point-source x-ray nanolithography Forber RA, Chen ZW, Menon R, Grygier R, Mrowka S, Turcu ICE, Gaeta CJ, Cassidy K, Smith HI Journal of Vacuum Science & Technology B, 20(6), 2984, 2002 |