화학공학소재연구정보센터
검색결과 : 2건
No. Article
1 High-power collimated laser-plasma source for proximity x-ray nanolithography
Gaeta CJ, Rieger H, Turcu ICE, Forber RA, Campeau SM, Cassidy KL, Powers MF, Stone A, Maldonado JR, Mrowka S, French G, Naungayan J, Kelsy C, Hark P, Morris JH, Foster RM, Carosella JC, Fleming D, Selzer F, Siegert H, Smith HI, Lim MH, Cheng Z, Burdett J, Gibson D, Whitlock RR, Dozier CM, Newman DA
Journal of Vacuum Science & Technology B, 21(1), 280, 2003
2 Collimated point-source x-ray nanolithography
Forber RA, Chen ZW, Menon R, Grygier R, Mrowka S, Turcu ICE, Gaeta CJ, Cassidy K, Smith HI
Journal of Vacuum Science & Technology B, 20(6), 2984, 2002