검색결과 : 5건
| No. | Article |
|---|---|
| 1 |
Performance and analysis of an electron cyclotron resonance plasma cathode Hidaka Y, Foster JE, Getty WD, Gilgenbach RM, Lau YY Journal of Vacuum Science & Technology A, 25(4), 781, 2007 |
| 2 |
Determination of metal vapor ion concentration in an argon/copper plasma for ionized physical vapor deposition (vol A16, pg 2198, 1998) Foster JE, Wendt AE, Wang WW, Booske JH Journal of Vacuum Science & Technology A, 17(1), 322, 1999 |
| 3 |
Measurement of electron energy distribution function in an argon copper plasma for ionized physical vapor deposition Lu ZC, Foster JE, Snodgrass TG, Booske JH, Wendt AE Journal of Vacuum Science & Technology A, 17(3), 840, 1999 |
| 4 |
Determination of metal vapor ion concentration in an argon/copper plasma for ionized physical vapor deposition Foster JE, Wendt AE, Wang WW, Booske JH Journal of Vacuum Science & Technology A, 16(4), 2198, 1998 |
| 5 |
Antenna sputtering in an internal inductively coupled plasma for ionized physical vapor deposition Foster JE, Wang W, Wendt AE, Booske J Journal of Vacuum Science & Technology B, 16(2), 532, 1998 |