검색결과 : 1건
No. | Article |
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1 |
Formation of size-controlled silicon nanocrystals in plasma enhanced chemical vapor deposition grown SiOxNy/SiO2 superlattices Hartel AM, Hiller D, Gutsch S, Loper P, Estrade S, Peiro F, Garrido B, Zacharias M Thin Solid Films, 520(1), 121, 2011 |