검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Diffusion of Copper Through Dielectric Films Under Bias Temperature Stress Raghavan G, Chiang C, Anders PB, Tzeng SM, Villasol R, Bai G, Bohr M, Fraser DB Thin Solid Films, 262(1-2), 168, 1995 |
| 2 |
Anomalous Behavior of Shallow BF3 Plasma Immersion Ion-Implantation Jones EC, En W, Ogawa S, Fraser DB, Cheung NW Journal of Vacuum Science & Technology B, 12(2), 956, 1994 |