검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Process optimization of dielectrics chemical mechanical planarization processes for ultralarge scale integration multilevel metallization Treichel H, Frausto R, Srivatsan S, Whithers B, Meyer T, Morishige R Journal of Vacuum Science & Technology A, 17(4), 1160, 1999 |