검색결과 : 2건
No. | Article |
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1 |
Stability of plasma deposited thin film transistors -comparison of amorphous and microcrystalline silicon Wehrspohn RB, Deane SC, French ID, Powell MJ Thin Solid Films, 383(1-2), 117, 2001 |
2 |
Plasma-Enhanced Chemical-Vapor-Deposition of Amorphous-Silicon Nitride for Thin-Film Diode Active-Matrix Liquid-Crystal Displays Oversluizen G, Lodders WH, French ID Thin Solid Films, 241(1-2), 287, 1994 |