검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Improving the metallic content of focused electron beam-induced deposits by a scanning electron microscope integrated hydrogen-argon microplasma generator Miyazoe H, Utke I, Kikuchi H, Kiriu S, Friedli V, Michler J, Terashima K Journal of Vacuum Science & Technology B, 28(4), 744, 2010 |
| 2 |
Resolution in focused electron- and ion-beam induced processing Utke I, Friedli V, Purrucker M, Michler J Journal of Vacuum Science & Technology B, 25(6), 2219, 2007 |