검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Sidewall damage in plasma etching of Si/SiGe heterostructures Ding R, Klein LJ, Friesen MG, Eriksson MA, Wendt AE Journal of Vacuum Science & Technology A, 27(4), 836, 2009 |
| No. | Article |
|---|---|
| 1 |
Sidewall damage in plasma etching of Si/SiGe heterostructures Ding R, Klein LJ, Friesen MG, Eriksson MA, Wendt AE Journal of Vacuum Science & Technology A, 27(4), 836, 2009 |