검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Remarkably efficient acid generation in chemically amplified resist from quantum chemistry modeling Granovsky AA, Bochenkova AV, Suetin N, Fryer D, Singh V Journal of Vacuum Science & Technology B, 25(1), 58, 2007 |
| 2 |
Latent Image-Formation - Nanoscale Topography and Calorimetric Measurements in Chemically Amplified Resists Ocola LE, Fryer D, Nealey P, Depablo J, Cerrina F, Kammer S Journal of Vacuum Science & Technology B, 14(6), 3974, 1996 |