검색결과 : 7건
| No. | Article |
|---|---|
| 1 |
Effect of microstructure on deprotection kinetics in photoresist Fryer DS, Singh V, Bollepalli SB, Granovsky AA Journal of Vacuum Science & Technology B, 26(6), 2311, 2008 |
| 2 |
Extraordinary elevation of the glass transition temperature of thin polymer films grafted to silicon oxide substrates Tate RS, Fryer DS, Pasqualini S, Montague MF, de Pablo JJ, Nealey PF Journal of Chemical Physics, 115(21), 9982, 2001 |
| 3 |
Dependence of the glass transition temperature of polymer films on interfacial energy and thickness Fryer DS, Peters RD, Kim EJ, Tomaszewski JE, de Pablo JJ, Nealey PF, White CC, Wu WL Macromolecules, 34(16), 5627, 2001 |
| 4 |
Study of the fundamental contributions to line edge roughness in a 193 nm, top surface imaging system Somervell MH, Fryer DS, Osborn B, Patterson K, Byers J, Willson CG Journal of Vacuum Science & Technology B, 18(5), 2551, 2000 |
| 5 |
Scaling of T-g and reaction rate with film thickness in photoresist: A thermal probe study Fryer DS, Nealey PF, de Pablo JJ Journal of Vacuum Science & Technology B, 18(6), 3376, 2000 |
| 6 |
Thermal probe measurements of the glass transition temperature for ultrathin polymer films as a function of thickness Fryer DS, Nealey PF, de Pablo JJ Macromolecules, 33(17), 6439, 2000 |
| 7 |
Study of acid diffusion in resist near the glass transition temperature Fryer DS, Bollepali S, de Pablo JJ, Nealey PF Journal of Vacuum Science & Technology B, 17(6), 3351, 1999 |