검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
Development of a simple, compact, low-cost interference lithography system Korre H, Fucetola CP, Johnson JA, Berggren KK Journal of Vacuum Science & Technology B, 28(6), C6Q20, 2010 |
| 2 |
Coherent diffraction lithography: Periodic patterns via mask-based interference lithography Fucetola CP, Patel AA, Moon EE, O'Reilly TB, Smith HI Journal of Vacuum Science & Technology B, 27(6), 2947, 2009 |
| 3 |
Low-cost interference lithography Fucetola CP, Korre H, Berggren KK Journal of Vacuum Science & Technology B, 27(6), 2958, 2009 |
| 4 |
Exposure latitude of deep-ultraviolet conformable contact photolithography Fucetola CP, Carter DJD, Goodberlet JG Journal of Vacuum Science & Technology B, 26(1), 36, 2008 |