검색결과 : 9건
| No. | Article |
|---|---|
| 1 |
Stress relaxation and phase stability of cubic boron nitride films during ion post implantation and annealing Fitz C, Fukarek W, Moller W Thin Solid Films, 408(1-2), 155, 2002 |
| 2 |
In situ characterization of thin film growth: Boron nitride on silicon Fukarek W Journal of Vacuum Science & Technology A, 19(4), 2017, 2001 |
| 3 |
Stress relaxation during annealing of boron nitride films Fitz C, Kolitsch A, Fukarek W Thin Solid Films, 389(1-2), 173, 2001 |
| 4 |
In situ measurement of stress during deposition of boron nitride films Fukarek W, Fitz C, Kolitsch A, Moller W Materials Science Forum, 347-3, 156, 2000 |
| 5 |
Composite germanium/C : H films prepared by DC unbalanced magnetron sputtering Biederman H, Stundzia V, Slavinska D, Zalman J, Pesicka J, Vanecek M, Zemek J, Fukarek W Thin Solid Films, 351(1-2), 151, 1999 |
| 6 |
In situ characterization of cubic boron nitride film growth in the IR spectral region Barth KL, Fukarek W, Maucher HP, Plass MF, Lunk A Thin Solid Films, 313-314, 697, 1998 |
| 7 |
Layered Growth of Boron-Nitride Thin-Films Plass MF, Fukarek W, Kolitsch A, Schell N, Moller W Thin Solid Films, 305(1-2), 172, 1997 |
| 8 |
Investigations on the structure of boron nitride films Fukarek W, Kruse O, Kolitsch A, Moller W Thin Solid Films, 308-309, 38, 1997 |
| 9 |
Application of Dynamic in-Situ Ellipsometry to the Deposition of Tin-Doped Indium Oxide-Films by Reactive Direct-Current Magnetron Sputtering Fukarek W, Kersten H Journal of Vacuum Science & Technology A, 12(2), 523, 1994 |