검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Analysis and characterization of a mechanical sensor to monitor stress in interconnect features Wilson CJ, Croes K, Tokei Z, Beyer GP, Gallacher BJ, Bull SJ, Horsfall AB, O'Neill AG Thin Solid Films, 519(1), 443, 2010 |
| No. | Article |
|---|---|
| 1 |
Analysis and characterization of a mechanical sensor to monitor stress in interconnect features Wilson CJ, Croes K, Tokei Z, Beyer GP, Gallacher BJ, Bull SJ, Horsfall AB, O'Neill AG Thin Solid Films, 519(1), 443, 2010 |