검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Plasma doping for shallow junctions Goeckner MJ, Felch SB, Fang Z, Lenoble D, Galvier J, Grouillet A, Yeap GCF, Bang D, Lin MR Journal of Vacuum Science & Technology B, 17(5), 2290, 1999 |
| No. | Article |
|---|---|
| 1 |
Plasma doping for shallow junctions Goeckner MJ, Felch SB, Fang Z, Lenoble D, Galvier J, Grouillet A, Yeap GCF, Bang D, Lin MR Journal of Vacuum Science & Technology B, 17(5), 2290, 1999 |