화학공학소재연구정보센터
검색결과 : 3건
No. Article
1 Image placement issues for ITO-based step and flash imprint lithography templates
Nordquist KJ, Ainley ES, Mancini DP, Dauksher WJ, Gehoski KA, Baker J, Resnick DJ, Masnyj Z, Mangat PJS
Journal of Vacuum Science & Technology B, 22(2), 695, 2004
2 Repair of step and flash imprint lithography templates
Dauksher WJ, Nordquist KJ, Le NV, Gehoski KA, Mancini DP, Resnick DJ, Casoose L, Bozak R, White R, Csuy J, Lee D
Journal of Vacuum Science & Technology B, 22(6), 3306, 2004
3 Hydrogen silsesquioxane for direct electron-beam patterning of step and flash imprint lithography templates
Mancini DP, Gehoski KA, Ainley E, Nordquist KJ, Resnick DJ, Bailey TC, Sreenivasan SV, Ekerdt JG, Willson CG
Journal of Vacuum Science & Technology B, 20(6), 2896, 2002