화학공학소재연구정보센터
검색결과 : 2건
No. Article
1 Depth Profiling of Dopants in Thin Gate Oxides in Complementary Metal-Oxide-Semiconductor Structures by Resonance Ionization Mass-Spectrometry
Downey SW, Emerson AB, Georgiou GE, Bevk J, Kistler RC, Moriya N, Jacobson DC, Wise ML
Journal of Vacuum Science & Technology B, 13(2), 167, 1995
2 Thermal-Stability Limits of Thin TiSi2 - Effect on Submicron Line Resistance and Shallow Junction Leakage
Georgiou GE, Abiko H, Baiocchi FA, Ha NT, Nakahara S
Journal of the Electrochemical Society, 141(5), 1351, 1994