검색결과 : 2건
No. | Article |
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1 |
Depth Profiling of Dopants in Thin Gate Oxides in Complementary Metal-Oxide-Semiconductor Structures by Resonance Ionization Mass-Spectrometry Downey SW, Emerson AB, Georgiou GE, Bevk J, Kistler RC, Moriya N, Jacobson DC, Wise ML Journal of Vacuum Science & Technology B, 13(2), 167, 1995 |
2 |
Thermal-Stability Limits of Thin TiSi2 - Effect on Submicron Line Resistance and Shallow Junction Leakage Georgiou GE, Abiko H, Baiocchi FA, Ha NT, Nakahara S Journal of the Electrochemical Society, 141(5), 1351, 1994 |