검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Influence of the epitaxial growth and device processing on the overlay accuracy during processing of the d-DotFET Moers J, Gerharz J, Rinke G, Mussler G, Trellenkamp S, Grutzmacher D Thin Solid Films, 518(9), 2565, 2010 |
| No. | Article |
|---|---|
| 1 |
Influence of the epitaxial growth and device processing on the overlay accuracy during processing of the d-DotFET Moers J, Gerharz J, Rinke G, Mussler G, Trellenkamp S, Grutzmacher D Thin Solid Films, 518(9), 2565, 2010 |