검색결과 : 6건
| No. | Article |
|---|---|
| 1 |
Progress toward a raster multibeam lithography tool Coyle ST, Shamoun B, Yu M, Maldonado J, Thomas T, Holmgren D, Chen X, Scheinfein MR, DeVore B, Gesley M Journal of Vacuum Science & Technology B, 22(2), 501, 2004 |
| 2 |
Cs halide photocathode for multi-electron-beam pattern generator Maldonado JR, Coyle ST, Shamoun B, Yu M, Gesley M, Pianetta P Journal of Vacuum Science & Technology B, 22(6), 3025, 2004 |
| 3 |
Prototype raster multibeam lithography tool Coyle ST, Holmgren D, Chen X, Thomas T, Sagle A, Maldonado J, Shamoun B, Allen P, Gesley M Journal of Vacuum Science & Technology B, 20(6), 2657, 2002 |
| 4 |
Aerial image slope and proximity effects on critical dimensions in mask lithography Sagle A, Gesley M, Kao H, Innes R Journal of Vacuum Science & Technology B, 16(6), 3563, 1998 |
| 5 |
Experimental Evaluation of an Electron-Beam Pulse-Modulated Blanker (160 MHz) for Next-Generation Electron-Beam Raster Scan Systems Muray A, Colby D, Teitzel R, Gesley M Journal of Vacuum Science & Technology B, 13(6), 2488, 1995 |
| 6 |
Electrodynamics of Fast Beam Blankers Gesley M, Colby D, Raymond F, Mcclure D, Abboud F Journal of Vacuum Science & Technology B, 11(6), 2378, 1993 |