검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
Performance and analysis of an electron cyclotron resonance plasma cathode Hidaka Y, Foster JE, Getty WD, Gilgenbach RM, Lau YY Journal of Vacuum Science & Technology A, 25(4), 781, 2007 |
| 2 |
Comparison of Argon Electron-Cyclotron-Resonance Plasmas in 3 Magnetic-Field Configurations .2. Energy-Distribution of Argon Ions Junck KL, Getty WD Journal of Vacuum Science & Technology A, 12(3), 760, 1994 |
| 3 |
Comparison of Ar Electron-Cyclotron-Resonance Plasmas in 3 Magnetic-Field Configurations .1. Electron-Temperature and Plasma-Density Junck KL, Getty WD Journal of Vacuum Science & Technology A, 12(5), 2767, 1994 |
| 4 |
Size-Scalable, 2.45-GHz Electron-Cyclotron-Resonance Plasma Source Using Permanent-Magnets and Wave-Guide Coupling Getty WD, Geddes JB Journal of Vacuum Science & Technology B, 12(1), 408, 1994 |