검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Deep dry etching of GaAs and GaSb using Cl-2/Ar plasma discharges Giehl AR, Gumbel M, Kessler M, Herhammer N, Hoffmann G, Fouckhardt H Journal of Vacuum Science & Technology B, 21(6), 2393, 2003 |
| 2 |
Technology and realization of metallic curved waveguide mirrors in polymer film waveguides based on anisotropic plasma etching Wolff S, Grosse A, Schimper HJ, Giehl AR, Kuhnke M, Grote R, Fouckhardt H Journal of Vacuum Science & Technology A, 19(1), 87, 2001 |