검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Performance and analysis of an electron cyclotron resonance plasma cathode Hidaka Y, Foster JE, Getty WD, Gilgenbach RM, Lau YY Journal of Vacuum Science & Technology A, 25(4), 781, 2007 |
| No. | Article |
|---|---|
| 1 |
Performance and analysis of an electron cyclotron resonance plasma cathode Hidaka Y, Foster JE, Getty WD, Gilgenbach RM, Lau YY Journal of Vacuum Science & Technology A, 25(4), 781, 2007 |