검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Accuracy of Thin-Film Stress Measurements with C-Si Microbeams Fabricated by Dry-Etching Boutry M, Bosseboeuf A, Bourouina T, Grandchamp JP, Dufourgergam E, Gilles JP Journal of Vacuum Science & Technology B, 15(5), 1767, 1997 |