검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Fourier-transform infrared measurements of CHF3/O-2 discharges in an electron cyclotron resonance reactor Goeckner MJ, Goeckner NA Journal of Vacuum Science & Technology A, 17(5), 2586, 1999 |
| No. | Article |
|---|---|
| 1 |
Fourier-transform infrared measurements of CHF3/O-2 discharges in an electron cyclotron resonance reactor Goeckner MJ, Goeckner NA Journal of Vacuum Science & Technology A, 17(5), 2586, 1999 |