검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
Influence of the ion bombardment of O-2 plasmas on low-k materials Verdonck P, Samara V, Goodyear A, Ferchichi A, Van Besien E, Baklanov MR, Braithwaite N Thin Solid Films, 520(1), 464, 2011 |
| 2 |
The influence of diffusion of fluorine compounds for silicon lateral etching Verdonck P, Goodyear A, Braithwaite NS Thin Solid Films, 459(1-2), 141, 2004 |
| 3 |
Importance of fluorine surface diffusion for plasma etching of silicon Verdonck P, Goodyear A, Mansano RD, Barroy PRJ, Braithwaite NSJ Journal of Vacuum Science & Technology B, 20(3), 791, 2002 |
| 4 |
The role of ions in the plasma polymerization of allylamine Beck AJ, Candan S, Short RD, Goodyear A, Braithwaite NSJ Journal of Physical Chemistry B, 105(24), 5730, 2001 |