검색결과 : 15건
| No. | Article |
|---|---|
| 1 |
Reflective electron beam lithography: A maskless ebeam direct write lithography approach using the reflective electron beam lithography concept Petric P, Bevis C, McCord M, Carroll A, Brodie A, Ummethala U, Grella L, Cheung A, Freed R Journal of Vacuum Science & Technology B, 28(6), C6C6, 2010 |
| 2 |
REBL: A novel approach to high speed maskless electron beam direct write lithography Petric P, Bevis C, Carroll A, Percy H, Zywno M, Standiford K, Brodie A, Bareket N, Grella L Journal of Vacuum Science & Technology B, 27(1), 161, 2009 |
| 3 |
Three-dimensional simulation of top down scanning electron microscopy images Grella L, Lorusso G, Lee P, Frank F, Adler DL Journal of Vacuum Science & Technology B, 22(6), 3399, 2004 |
| 4 |
Nanolithography performances of ultraviolet III chemically amplified positive resist Grella L, Gentili M, Di Fabrizio E, Baciocchi M, Mastrogiacomo L, Maggiora R, Scopa L Journal of Vacuum Science & Technology B, 15(6), 2596, 1997 |
| 5 |
Nanometer biodevice fabrication by electron beam lithography Di Fabrizio E, Grella L, Baciocchi M, Gentili M, Ascoli C, Cappella B, Frediani C, Morales P Journal of Vacuum Science & Technology B, 15(6), 2892, 1997 |
| 6 |
One-Step Electron-Beam Lithography for Multipurpose, Diffractive Optical-Elements with 200 nm Resolution Difabrizio E, Grella L, Baciocchi M, Gentili M, Peschiaroli D, Mastrogiacomo L, Maggiora R Journal of Vacuum Science & Technology B, 14(6), 3855, 1996 |
| 7 |
Application of a Reaction-Diffusion Model for Negative Chemically Amplified Resists to Determine Electron-Beam Proximity Correction Parameters Glezos N, Patsis GP, Raptis I, Argitis P, Gentili M, Grella L Journal of Vacuum Science & Technology B, 14(6), 4252, 1996 |
| 8 |
Nanometer Metrology by Means of Backscattered Electrons Difabrizio E, Grella L, Gentili M, Baciocchi M, Mastrogiacomo L, Maggiora R Journal of Vacuum Science & Technology B, 13(2), 321, 1995 |
| 9 |
High-Accuracy Thickness Measurements by Means of Backscattering Electron Metrology Baciocchi M, Difabrizio E, Gentili M, Grella L, Maggiora R, Mastrogiacomo L, Peschiaroli D Journal of Vacuum Science & Technology B, 13(6), 2676, 1995 |
| 10 |
Secondary-Electron Line Scans over High-Resolution Resist Images - Theoretical and Experimental Investigation of Induced Local Electrical-Field Effects Grella L, Difabrizio E, Gentili M, Baciocchi M, Mastrogiacomo L, Maggiora R, Capodicci L Journal of Vacuum Science & Technology B, 12(6), 3555, 1994 |