검색결과 : 6건
| No. | Article |
|---|---|
| 1 |
Application of electron holography to analysis of submicron structures Gribelyuk MA, Domenicucci AG, Ronsheim PA, McMurray JS, Gluschenkov O Journal of Vacuum Science & Technology B, 26(1), 408, 2008 |
| 2 |
Interfacial microstructure of NiSix/HfO2/SiOx/Si gate stacks Gribelyuk MA, Cabral C, Gusev EP, Narayanan V Thin Solid Films, 515(13), 5308, 2007 |
| 3 |
Electromigration in AlCu lines: comparison of Dual Damascene and metal reactive ion etching Filippi RG, Gribelyuk MA, Joseph T, Kane T, Sullivan TD, Clevenger LA, Costrini G, Gambino J, Iggulden RC, Kiewra EW, Ning XJ, Ravikumar R, Schnabel RF, Stojakovic G, Weber SJ, Gignac LM, Hu CK, Rath DL, Rodbell KP Thin Solid Films, 388(1-2), 303, 2001 |
| 4 |
Growth and microstructure of Si/CaF2/Si(111) heterostructures Gribelyuk MA, Wilk GD Thin Solid Films, 339(1-2), 51, 1999 |
| 5 |
Strong effect of dopant concentration gradient an etching rate Ukraintsev VA, McGlothlin R, Gribelyuk MA, Edwards H Journal of Vacuum Science & Technology B, 16(1), 476, 1998 |
| 6 |
Advanced salicides for 0.10 mu m CMOS : Co salicide processes with low diode leakage and Ti salicide processes with direct formation of low resistivity C54 TiSi2 Kittl JA, Hong QZ, Yang H, Yu N, Samavedam SB, Gribelyuk MA Thin Solid Films, 332(1-2), 404, 1998 |