검색결과 : 8건
| No. | Article |
|---|---|
| 1 |
Batch CVD process for depositing Pd activation layers Wang LD, Griffin GL Journal of the Electrochemical Society, 154(3), D151, 2007 |
| 2 |
Kinetics of copper CVD using solution delivery of Cu(hfac)(2) and isopropanol Wang LD, Griffin GL Journal of the Electrochemical Society, 153(3), C137, 2006 |
| 3 |
Solution delivery of Cu(hfac)(2) for alcohol-assisted chemical vapor deposition of copper Borgharkar NS, Griffin GL, Fan H, Maverick AW Journal of the Electrochemical Society, 146(3), 1041, 1999 |
| 4 |
Toward a unified reaction mechanism for chemical vapor deposition of copper Borgharkar NS, Griffin GL Journal of the Electrochemical Society, 145(1), 347, 1998 |
| 5 |
Alcohol-assisted growth of copper CVD films Borgharkar NS, Griffin GL, James A, Maverick AW Thin Solid Films, 320(1), 86, 1998 |
| 6 |
Wet Chemical Etching with Lactic-Acid Solutions for InP-Based Semiconductor-Devices Ikossianastasiou K, Binari SC, Kelner G, Boos JB, Kyono CS, Mittereder J, Griffin GL Journal of the Electrochemical Society, 142(10), 3558, 1995 |
| 7 |
Reactor Transport Effects in Copper APCVD Wang J, Little RB, Lai WG, Griffin GL Thin Solid Films, 262(1-2), 31, 1995 |
| 8 |
Gas-Phase Kinetics for TiO2 CVD - Hot-Wall Reactor Results Zhang QM, Griffin GL Thin Solid Films, 263(1), 65, 1995 |