검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
High quality r.f. sputtered metal oxides (Ta2O5, HfO2 and their properties after annealing Gruger H, Kunath C, Kurth E, Sorge S, Pufe W, Pechstein I Thin Solid Films, 447, 509, 2004 |
| 2 |
Preparation of CNx-phases using plasma-assisted and hot filament chemical vapour deposition Leonhardt A, Gruger H, Selbmann D, Arnold B, Thomas J Thin Solid Films, 332(1-2), 69, 1998 |
| 3 |
Deposition of Cnx Thin-Films by Plasma-Activated Chemical-Vapor-Deposition Using Various Precursors as Carbon Source Gruger H, Selbmann D, Wolf E, Leonhardt A Journal of Materials Science, 32(11), 2849, 1997 |