화학공학소재연구정보센터
검색결과 : 2건
No. Article
1 Investigation of silicon contamination of Ta filaments used for thin film silicon deposition
Grunski D, Schroeder B, Scheib M, Merz RM, Bock W, Wagner C
Thin Solid Films, 516(5), 818, 2008
2 Influence of contaminations on the performance of thin-film silicon solar cells prepared after in situ reactor plasma cleaning
Grunski D, Rech B, Schmitz R, Muck A, Pincon O, Breuer U, Beyer W
Thin Solid Films, 516(14), 4639, 2008