검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Direct fabrication of large-grain polycrystalline silicon thin films by RF-biased RF-PECVD at low temperature Gu RD, Chen PL Thin Solid Films, 498(1-2), 2, 2006 |
| No. | Article |
|---|---|
| 1 |
Direct fabrication of large-grain polycrystalline silicon thin films by RF-biased RF-PECVD at low temperature Gu RD, Chen PL Thin Solid Films, 498(1-2), 2, 2006 |