검색결과 : 18건
| No. | Article |
|---|---|
| 1 |
Fabrication and characterization of Sb/B4C multilayer mirrors for soft X-rays Kopylets IA, Kondratenko VV, Zubarev EN, Voronov DL, Gullikson EM, Vishnyakov EA, Ragozin EN Applied Surface Science, 307, 360, 2014 |
| 2 |
Control of surface mobility for conformal deposition of Mo-Si multilayers on saw-tooth substrates Voronov DL, Anderson EH, Gullikson EM, Salmassi F, Warwick T, Yashchuk VV, Padmore HA Applied Surface Science, 284, 575, 2013 |
| 3 |
Chemical-State Analysis of Organic Semiconductors Using Soft X-ray Absorption Spectroscopy Combined with First-Principles Calculation Natsume Y, Kohno T, Minakata T, Konishi T, Gullikson EM, Muramatsu Y Journal of Physical Chemistry A, 116(6), 1527, 2012 |
| 4 |
Extreme ultraviolet mask substrate surface roughness effects on lithographic patterning George SA, Naulleau PP, Mochi I, Salmassi F, Gullikson EM, Goldberg KA, Anderson EH Journal of Vacuum Science & Technology B, 28(6), C6E23, 2010 |
| 5 |
Measuring the Structure of Epitaxially Assembled Block Copolymer Domains with Soft X-ray Diffraction Stein GE, Liddle JA, Aquila AL, Gullikson EM Macromolecules, 43(1), 433, 2010 |
| 6 |
Effects of mask absorber structures on the extreme ultraviolet lithography Seo HS, Lee DG, Kim H, Huh S, Ahn BS, Han H, Kim D, Kim SS, Cho HK, Gullikson EM Journal of Vacuum Science & Technology B, 26(6), 2208, 2008 |
| 7 |
Multilayer phase-only diffraction gratings: Fabrication and application to extreme ultraviolet optics Salmassi F, Gullikson EM, Anderson EH, Naulleau PP Journal of Vacuum Science & Technology B, 25(6), 2055, 2007 |
| 8 |
Extreme ultraviolet binary phase gratings: Fabrication and application to diffractive optics Salmassi F, Naulleau PP, Gullikson EM, Olynick DL, Liddle JA Journal of Vacuum Science & Technology A, 24(4), 1136, 2006 |
| 9 |
Lithographic characterization of the flare in the Berkeley 0.3 numerical aperture extreme ultraviolet microfield optic Cain JP, Naulleau PP, Gullikson EM, Spanos CJ Journal of Vacuum Science & Technology B, 24(3), 1234, 2006 |
| 10 |
Interface engineering of short-period Ni/V multilayer X-ray mirrors Eriksson F, Ghafoor N, Schafers F, Gullikson EM, Birch J Thin Solid Films, 500(1-2), 84, 2006 |