화학공학소재연구정보센터
검색결과 : 2건
No. Article
1 Surface potential and morphology issues of annealed (HfO2)(x)(SiO2)(1-x) gate oxides
Ludeke R, Lysaght P, Cartier E, Gusev E, Chudzik M, Foran B, Bersuker G
Journal of Vacuum Science & Technology B, 22(4), 2113, 2004
2 The growth chemistry and interfacial properties of silicon oxynitride and metal oxide ultrathin films on silicon
Lu HC, Gusev E, Yasuda N, Green M, Alers G, Garfunkel E, Gustafsson T
Applied Surface Science, 166(1-4), 465, 2000