검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Conformal aluminum oxide coating of high aspect ratio structures using metalorganic chemical vapor deposition Wiest F, Capodieci V, Blank O, Gutsche M, Schulze J, Eisele I, Matusche J, Schmidt UI Thin Solid Films, 496(2), 240, 2006 |
| 2 |
Crystallization behavior of thin ALD-Al2O3 films Jakschik S, Schroeder U, Hecht T, Gutsche M, Seidl H, Bartha JW Thin Solid Films, 425(1-2), 216, 2003 |
| 3 |
Growth and Characterization of Epitaxial Vanadium Films Gutsche M, Kraus H, Jochum J, Kemmather B, Gutekunst G Thin Solid Films, 248(1), 18, 1994 |