검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Inductively coupled plasma reactive ion etching of magnetic tunnel junction stacks using H2O/CH4 mixture Lee TY, Lee IH, Chung CW Thin Solid Films, 547, 146, 2013 |
| No. | Article |
|---|---|
| 1 |
Inductively coupled plasma reactive ion etching of magnetic tunnel junction stacks using H2O/CH4 mixture Lee TY, Lee IH, Chung CW Thin Solid Films, 547, 146, 2013 |