검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Destructive abatement of CF4 and C2F6 via a plasma induced reaction with CaO Delattre JL, Friedman TL, Stacy AM Journal of Vacuum Science & Technology B, 17(6), 2664, 1999 |
| No. | Article |
|---|---|
| 1 |
Destructive abatement of CF4 and C2F6 via a plasma induced reaction with CaO Delattre JL, Friedman TL, Stacy AM Journal of Vacuum Science & Technology B, 17(6), 2664, 1999 |