검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Single-Layer Chemically Amplified Photoresists for 193-nm Lithography Wallraff GM, Allen RD, Hinsberg WD, Larson CF, Johnson RD, Dipietro R, Breyta G, Hacker N, Kunz RR Journal of Vacuum Science & Technology B, 11(6), 2783, 1993 |