검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Electron-Beam Defined Surface Gratings in AlGaAs with Precisely Controlled Duty Cycle Using a Multiple Line Exposure Technique Eriksson N, Hagberg M, Larsson A Journal of Vacuum Science & Technology B, 14(1), 184, 1996 |
| 2 |
Investigation of Chemically Assisted Ion-Beam Etching for the Fabrication of Vertical, Ultrahigh Quality Facets in GaAs Hagberg M, Jonsson B, Larsson AG Journal of Vacuum Science & Technology B, 12(2), 555, 1994 |