검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Large leakage-current reduction of ultrathin industrial SiON wafers induced by phonon-energy-coupling enhancement Ong PL, Chen Z, Haggag A, Luo TY Electrochemical and Solid State Letters, 11(11), H293, 2008 |
| No. | Article |
|---|---|
| 1 |
Large leakage-current reduction of ultrathin industrial SiON wafers induced by phonon-energy-coupling enhancement Ong PL, Chen Z, Haggag A, Luo TY Electrochemical and Solid State Letters, 11(11), H293, 2008 |