화학공학소재연구정보센터
검색결과 : 3건
No. Article
1 Characterization of carbon-doped SiO2 low k thin films -Preparation by plasma-enhanced chemical vapor deposition from tetramethylsilane
Han LCM, Pan JS, Chen SM, Balasubramanian N, Shi JN, Wong LS, Foo PD
Journal of the Electrochemical Society, 148(7), F148, 2001
2 Pulsed plasma polymerization of an aromatic perfluorocarbon monomer: Formation of low dielectric constant, high thermal stability films
Han LCM, Timmons RB, Lee WW
Journal of Vacuum Science & Technology B, 18(2), 799, 2000
3 Pulsed-plasma polymerization of 1-vinyl-2-pyrrolidone : Synthesis of a linear polymer
Han LCM, Timmons RB
Journal of Polymer Science Part A: Polymer Chemistry, 36(17), 3121, 1998