검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Atomic layer deposition of calcium oxide and calcium hafnium oxide films using calcium cyclopentadienyl precursor Kukli K, Ritala M, Sajavaara T, Haninen T, Leskela M Thin Solid Films, 500(1-2), 322, 2006 |
| No. | Article |
|---|---|
| 1 |
Atomic layer deposition of calcium oxide and calcium hafnium oxide films using calcium cyclopentadienyl precursor Kukli K, Ritala M, Sajavaara T, Haninen T, Leskela M Thin Solid Films, 500(1-2), 322, 2006 |