검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Cathodic debond of anodically bonded silicon to glass wafers Plaza JA, Gonzalez E, Esteve J, Visser MM, Wang DT, Hanneborg A Electrochemical and Solid State Letters, 3(8), 392, 2000 |
| 2 |
Laser reflectance interferometry for in situ determination of silicon etch rate in various solutions Steinsland E, Finstad T, Hanneborg A Journal of the Electrochemical Society, 146(10), 3890, 1999 |