검색결과 : 4건
No. | Article |
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1 |
X-ray diffraction study of residual stresses and microstructure in tungsten thin films sputter deposited on polyimide Villain P, Goudeau P, Ligot J, Benayoun S, Badawi KF, Hantzpergue JJ Journal of Vacuum Science & Technology A, 21(4), 967, 2003 |
2 |
Characterization and modeling of electrical resistivity of sputtered tungsten films Ligot J, Benayoun S, Hantzpergue JJ Journal of Vacuum Science & Technology A, 19(3), 798, 2001 |
3 |
Micro-scratch test study of TiN films grown on silicon by chemical vapor deposition Benayoun S, Hantzpergue JJ, Bouteville A Thin Solid Films, 389(1-2), 187, 2001 |
4 |
Microscratch test studies of thin silica films on stainless steel substrates Benayoun S, Fouilland-Paille L, Hantzpergue JJ Thin Solid Films, 352(1-2), 156, 1999 |