화학공학소재연구정보센터
검색결과 : 4건
No. Article
1 X-ray diffraction study of residual stresses and microstructure in tungsten thin films sputter deposited on polyimide
Villain P, Goudeau P, Ligot J, Benayoun S, Badawi KF, Hantzpergue JJ
Journal of Vacuum Science & Technology A, 21(4), 967, 2003
2 Characterization and modeling of electrical resistivity of sputtered tungsten films
Ligot J, Benayoun S, Hantzpergue JJ
Journal of Vacuum Science & Technology A, 19(3), 798, 2001
3 Micro-scratch test study of TiN films grown on silicon by chemical vapor deposition
Benayoun S, Hantzpergue JJ, Bouteville A
Thin Solid Films, 389(1-2), 187, 2001
4 Microscratch test studies of thin silica films on stainless steel substrates
Benayoun S, Fouilland-Paille L, Hantzpergue JJ
Thin Solid Films, 352(1-2), 156, 1999